Layered devices having surface curvature

ABSTRACT

A method of treating a substrate having first and second sides with corresponding oppositely facing first and second surfaces, to produce curvature in the first surface. The method includes the steps of removing material, according to a predetermined pattern, from the second side of the substrate, and applying a stress-producing film of material to at least one surface of the substrate to thereby cause the substrate to bend to produce the desired curvature in the first surface.

This is a division of application Ser. No. 07/087,778, filed Aug. 21,1987.

BACKGROUND OF THE INVENTION

This invention relates to a method of producing curvature on the surfaceof a substrate through selective removal of material from the substrateand selective application of stress-producing materials to thesubstrate.

The use of lenses and mirrors to focus and direct visible light andother electromagnetic radiation is well established. Conventional lensesand mirrors, however, are not effective for focusing or directingelectromagnetic radiation having short wavelengths, such as x-rays andshort-wave ultraviolet rays. It is known that short wavelength radiationis strongly reflected from reflective surfaces if the angle of incidenceto the surfaces is low, for example, less than five degrees for onenanometer (nm) or shorter wavelength x-rays. Employing such so-calledgrazing incidence techniques, however, is only effective if suitablyuniform and smooth reflective surfaces can be found, and this has proveddifficult to do. Use of conventional polished or mirrored surfaces,prepared using known grinding and polishing techniques, generally doesnot provide the desired control and accuracy in reflecting short waveradiation.

One approach to achieving better control and accuracy in reflectingx-rays, even at larger angles of incidence, is to use so-called Braggreflection--reflection of radiation from planes of a crystal. Thedrawback of this has, until recently, been that only very shortwavelength x-rays (less than one nanometer) could be reflected.Recently, however, multi-layered thin film structures have been employedfor reflecting longer wavelength x-rays.

Such reflection occurs at the interfaces of adjacent films havingdifferent refractive indices. The layers can be selected so thatreflected waves add constructively to produce a strong total reflection.

In order to focus electromagnetic radiation using reflection, it isnecessary to provide an appropriate curved surface capable of reflectingthe radiation. Currently used focusing devices are constructed either bylathing, grinding or otherwise abraiding a surface of a reflectorelement into a curved surface, or by casting a reflector element on acurved mandrel. Among the problems with these approaches are thedifficulty of obtaining desired curvatures, the roughness of theresulting curved surface, and the time required to prepare the elements.Polishing, of course, would be performed to smooth out the surface, butremaining irregularities would preclude or discourage use of the surfacefor focusing shorter wave radiation such as x-rays.

SUMMARY OF THE INVENTION

It is an object of the invention to provide a method of producing asmooth curved surface of a desired shape suitable for, but not limitedto, use as an optical focusing blank for short wavelengths such asx-rays.

It is also an object of the invention to provide such a method which isrelatively easy and inexpensive to carry out.

It is a further object of the invention to provide such a method whereinthe degree of curvature can be precisely controlled.

It is another object of the invention to provide a precision focusingstructure for radiant energy.

The above and other objects are realized in a specific illustrativeembodiment of a method of producing curvature on a working surface of asubstrate. The substrate, which may be a crystalline or amorphousmaterial, has a working side and surface, and a second side andoppositely facing surface from which substrate material is removedaccording to a predetermined pattern. The removal of material may becarried out by etching or even by cutting or abraiding with a cutting orabrasive tool. A stress producing film is applied to at least one of thesurfaces to cause the substrate to bend and produce the desiredcurvature in the working surface. The amount and shape of the curvatureis determined by the substrate thickness at the bottom of the removedmaterial pattern, the shape of the areas from which material is removed,and the stresses (dependent in part on the thickness) of the film. Thefilm may be selected to produce tensile stress or compressive stress onthe substrate, and placed on either or both sides of the substrate tocause the desired bending.

Although the above discussion concerned the use of the curved surfacefor focusing electromagnetic waves, the curved surface structure mightalso be used as molds for machinery, tools, etc., as specially shapedsupport structure for electrical circuitry, as electromagnetic radiationdetectors, or as diffraction gratings.

BRIEF DESCRIPTION OF THE DRAWINGS

The above and other objects, features and advantages of the inventionwill become apparent from a consideration of the following detaileddescription presented in connection with the accompanying drawings inwhich:

FIG. 1 is an isometric view of a substrate partially prepared, inaccordance with the principles of the present invention, for etching apattern of grooves in one surface to produce a desired curvature in anopposite surface; and

FIG. 2 is a sectional, partially fragmented view of the substrate ofFIG. 1 after etching and bending.

DETAILED DESCRIPTION

Referring to FIG. 1, there is shown a single-crystal silicon substrateor wafer 1 having highly polished, oppositely facing surfaces 2 and 3.The silicon substrate 1 is initially prepared so that the surfaces 2 and3 are generally parallel with the so-called [110] crystal planes of thesubstrate. Such substrates are commercially available and are known as[110] silicon wafers. Although the substrate is shown as being generallyrectangular, for the method of forming curved surfaces to be describedherein, other shapes such as circular, oval or the like could also beselected, depending upon the needs and interests of the user.Advantageously, thickness variation in the substrate 1 will be less thanfive micrometers (microns) over a two centimeter surface distance.

Shown covering the bottom surface 3, sides, and part of the top surface2 is a layer of silicon nitride 4. Ridges 5 of silicon nitride areformed on the top surface 2 of the substrate using known film etchingtechniques. For example, the substrate 1 would typically be firstthoroughly cleaned such as in a bath of a solution of sulfuric acid andhydrogen peroxide. After rinsing with water, the substrate is placed ina 900° C. oven so that a layer of silicon dioxide may be dry-grown onthe substrate surfaces to a thickness of between five and twenty nm.This oxide layer serves as a stress buffer for the substrate to preventcracking thereof when later subjected to silicon nitride deposition.

Following growth of the silicon dioxide layer (not specifically shown inFIG. 1), the substrate is covered with a silicon nitride layer 4 whichwill serve several purposes including development of a stress to bendthe substrate, acting as a mask to enable selective etching of thesubstrate, and protecting the side 3 of the substrate opposite the sideto be etched. The nitride layer 4 may be deposited at a temperaturebetween 800° and 900° C., using well known low pressure chemical vapordeposition (LPCVD) techniques, to a thickness of about 0.24 microns. Thedeposited nitride layer develops a tensile stress as will be discussedfurther later on. It should be understood that the parameters fordeposition of the nitride layer could also be successfully employed.

Over the nitride layer 4 on one side of the substrate, a photoresistlayer is deposited such as by spinning. A mask, containing the patternto be etched into the substrate 1, is then used to expose the pattern inthe photoresist layer. The etching pattern to be used consists of aseries of side-by-side, generally parallel grooves, which willfacilitate bending the substrate to produce the desired curvature. Thewidth and spacing of the grooves, as well as the ultimate depth, allcontribute to determining the amount of bending which will be producedin the substrate.

To facilitate the etching of grooves in the silicon crystal substrate 1in the desired shape (generally parallel side walls), it is advantageousto align those portions of the mask corresponding to the grooves withthe lines of intersection between the [111] planes of the substratecrystal perpendicular to the surface and the surface plane,(corresponding to a <110> plane) of the substrate (these imaginary linesof intersection in the substrate surface are called traces). The etchingprocess will occur much faster in the <110> crystal direction than inthe <111> direction to thus allow for development of grooves in thesubstrate having generally parallel sidewalls.

After exposure of the mask pattern in the photoresist layer, thephotoresist is developed to remove it from those areas where the groovesare to be produced. These areas leave areas of silicon nitride exposedfor subsequent removal. Before removal of the exposed nitride areas, aprotective layer of photoresist is applied over the nitride layer on theother side of the substrate.

The exposed silicon nitride areas are then removed, for example, by useof a conventional plasma chamber. To completely remove the exposednitride and also the underlying silicon dioxide, the substrate is placedin a standard solution of buffered hydrofluoric acid. A strippingsolution may then be used to remove all remaining photoresist material.The condition of the substrate after completing these steps is as shownin FIG. 1, and the substrate is now in a condition where deep groovesmay be etched in the substrate itself.

Etching of grooves in the silicon crystal substrate is carried out byplacing the substrate in a 44% weight/weight solution of potassiumhydroxide and water mixed in a 5:2 ratio. This solution serves to etchapproximately six hundred times faster in the <110> direction than inthe <111> direction and the result is the formation of grooves havingsubstantially vertical side walls (ribs). The etching process continuesuntil the desired thickness 11 (FIG. 2) of the silicon substrate at thebottom of the grooves is achieved.

Since the silicon nitride layer 4 on the bottom of the substrate 1develops a tensile stress with respect to the substrate, the substrateslowly bends as the groove etching process takes place, as shown in FIG.2, to produce a generally concave curvature on the bottom surface. Asearlier indicated, the degree or radius of curvature of the substrate isdependent upon a number of factors such as groove depth and width, ribthickness, substrate thickness 11, and thickness of and stress producedby the silicon nitride layer 4. The inter-relationship and effect ofthese factors on curvature are known, see Woodbury, R. C. et al, "CurvedSilicon Substrates for Multilayer Structures", SPIE Vol. 691 X-RayImaging II (1986).

To mechanically strengthen the substrate of FIG. 2, a backing or pottingmaterial may be placed between ribs 12 developed by etching the grooves.Such potting material may be a conventional polymeric (e.g. epoxy)adhesive which upon hardening would strengthen the substrate andmaintain the curved surface (or interface) 3 in the desired shape. Itmight be noted that by strengthening the substrate in the mannerdescribed, further bending of the substrate may be induced, and thisshould be taken into account when doing the initial bending.

If the resulting substrate structure of FIG. 2 is to be used forfocusing visible light, the functional surface 7 of the silicon nitridelayer 4 would be covered with a reflective thin film coating 13, such asaluminum, gold, or a dielectric coating. If it were to be used to focusx-rays, a periodic-multilayer coating 14 would be applied to the concaveside of the substrate. Use of the substrate structure as a Bragg anglediffractor would not require a special additional coating, but wouldrequire bending of the structure to produce a surface curvature whichwould accommodate Bragg angle diffraction requirements.

The above-described method and process for producing a curved(cylindrical) surface on a substrate is one of a number of processeswhich might be used. Another embodiment of the method of the presentinvention suitable for achieving non-cylindrical bending (i.e., bendingabout more than one axis) could include the steps described above up tothe bending of the substrate and before application of additional films,such as reflective coatings, to the concave surface. At this point, thesubstrate could next be subjected to high pressure, low temperatureoxidation of the exposed portions of silicon for the purpose ofachieving oxide growth. Producing oxide growth at lower temperaturesreduces susceptability to slip of substrate crystal planes. Highpressure, of about 10 atmospheres to 100 atmospheres, is used so thatoxidation of the silicon can proceed rapidly enough to cause theformation of a silicon dioxide layer on the sides of the ribs 12 (FIG.2) and at the bottoms of the grooves 15, all at lower temperatures,e.g., below 700° C.

Since silicon dioxide when applied to a silicon substrate producescompressive stresses, the silicon dioxide layers produced as discussedabove operate to produce compressive stresses parallel to the ribs 12and this causes the substrate to bend, with an arc of curvature in theplane of the ribs (rather than in the plane of curvature shown in FIG.2). The result is a noncylindrical bending, i.e., a bending about morethan one axis.

After development of a silicon dioxide layer, other coatings such asreflective coatings could be added to the working surface.

Still another embodiment of the method of the present invention involvessubstantially the same steps described in the first embodiment exceptthat the initial silicon dioxide film is ultimately used to produce theetching pattern in the substrate and is thermally grown on the substrateto a thickness of between 0.7 and 2 microns. Such thermal-growthtechniques are well known in the art. After growth of the silicondioxide layer, the mask pattern is produced directly in the silicondioxide layer, without the use of silicon nitride. Grooves in thesilicon are then etched in a standard fashion. After etching, a silicondioxide layer is thermally grown on all exposed surfaces of thesubstrate and then silicon dioxide is removed from the working orfunctional surface to allow the compressive stresses produced by thesilicon dioxide on the etched side to bend the substrate, therebyyielding the desired concave curvature on the working side.

It is to be understood that the above-described arrangements are onlyillustrative of the application of the principles of the presentinvention. Numerous modifications and alternative arrangements may bedevised by those skilled in the art without departing from the spiritand scope of the present invention and the appended claims are intendedto cover such modifications and arrangements.

What is claimed is:
 1. A device for directing electromagnetic radiationcomprisinga substrate having first and second sides and correspondingoppositely facing first and second surfaces, said substrate furtherhaving a predetermined pattern of areas on said second side from whichsubstrate material has been removed, and a stress-producing film ofmaterial coated on at least one of the surfaces of the substrate,wherein said film in combination with said areas on said second sidefrom which substrate material has been removed, bends said substrate toa desired curvature so that said first surface reflects electromagneticradiation.
 2. The device of claim 1 further including a coating ofreflective material overlying said first surface.
 3. The device of claim1 further including a plurality of layers of x-ray radiation reflectivefilms.
 4. The device of claim 1 wherein said first surface is polishedto reflect electromagnetic radiation.
 5. The device of claim 1 whereinthe second side of the substrate is formed with a series of alternatinggrooves and ribs arranged generally parallel to one another.